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document
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Zhang, Luqianxue (author)
Trials of surface modifications using low pressure chemical vapor deposition (LPCVD) has successfully decreased the high temperature needed for the fabrication of SiC membrane from 2000°C to below 900 °C. With this great success on the reduction of the energy con-sumption, however, further studies on the chemical stability and the fouling...
master thesis 2022
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