Mo, J. (author), Shankar, S. (author), Pezone, R. (author), Zhang, Kouchi (author), Vollebregt, S. (author) Silicon carbide (SiC) is recognized as an excellent material for microelectromechanical systems (MEMS), especially those operating in challenging environments, such as high temperature, high radiation, and corrosive environments. However, SiC bulk micromachining is still a challenge, which hinders the development of complex SiC MEMS. To...
journal article 2024