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document
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Jiang, H. (author), Amani, Samira (author), Vogel, J.G. (author), Heidary Shalmany, S. (author), Nihtianova, S. (author)
This paper describes a high-performance Capacitance-to-Digital Converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5dB SNR in a 1ms conversion time, which is 34 times more energy-efficient than the prior...
conference paper 2018
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