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document
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Kawasaki, S. (author), Saccher, M. (author), de Wijs, Willem-Jan (author), van den Brand, Jeroen (author), Dekker, R. (author)
Capacitive micromachined ultrasonic transducers (CMUTs) with a built-in charge layer are known as a pre-charged CMUT. In our prior work, we have shown how to model and characterize the charges inside the pre-charged collapse-mode CMUT and conducted life-time test that showed that the charges trapped inside the dielectric were stable in the order...
conference paper 2023
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