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document
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Bruno, A. (author), De Lange, G. (author), Asaad, S. (author), Van der Enden, K.L. (author), Langford, N.K. (author), DiCarlo, L. (author)
We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1?M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate surface treatment prior to NbTiN deposition to optimize the metal-substrate interface and deep reactive...
journal article 2015
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