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Searched for: subject%3A%22extended%255C+Nijboer%255C-Zernike%255C+theory%22
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Extended Nijboer-Zernike (ENZ) based mask imaging: Efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm
Determination of resist parameters using the extended Nijboer-Zernike theory
Aerial image based lens metrology for wafer steppers
Aberration retrieval for high-NA optical systems using the Extended Nijboer-Zernike theory
Estimating resist parameters in optical lithography using the extended Nijboer-Zernike theory
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Source URL (retrieved on 2024-04-30 15:55):
https://repository.tudelft.nl/islandora/search/subject%3A%22extended%255C%20Nijboer%255C-Zernike%255C%20theory%22?collection=research&display=tud_grid&sort=mods_genre_s%20asc