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document
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Khosropanah, P (author), Suzuki, T. (author), Ridder, M. L. (author), Hijmering, R. A. (author), Akamatsu, H. (author), Gottardi, L (author), Van Der Kuur, J. (author), Gao, J.R. (author), Jackson, B. D. (author)
SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep...
conference paper 2016
Source URL (retrieved on 2024-06-09 08:43): https://repository.tudelft.nl/islandora/search/subject%3A%22spectrometer%22?f%5B0%5D=mods_subject_topic_ss%3A%22SiN%5C%20membrane%22&f%5B1%5D=mods_name_personal_author_namePart_family_ss%3A%22Jackson%22