Source URL (retrieved on 2024-05-05 15:40): https://repository.tudelft.nl/islandora/search?type=dismax&collection=research&f%5B0%5D=mods_genre_s%3A%22doctoral%5C%20thesis%22&f%5B1%5D=mods_name_personal_author_namePart_family_ss%3A%22Wei%22&f%5B2%5D=mods_subject_topic_ss%3A%22deep%5C%20reactive%5C-ion%5C%20etching%22&f%5B3%5D=mods_subject_topic_ss%3A%22micro%5C-manipulation%22&display=tud_grid&sort=mods_genre_s%20asc