Microscale friction reduction by normal force modulation in MEMS
Book Chapter
(2010)
Author(s)
W.M. van Spengen (TU Delft - Micro and Nano Engineering)
GHCJ Wijts (External organisation)
V Turq (External organisation)
JWM Frenken (External organisation)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:01c656f0-d44a-4d8f-8f3e-485356e30213
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Publication Year
2010
Language
English
Research Group
Micro and Nano Engineering
Pages (from-to)
339-350
ISBN (print)
978-90-04-19094-8
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