Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Conference Paper
(2008)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
LA Machado da Rocha (TU Delft - Electronic Instrumentation)
Reinoud Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:01ef5f26-4072-4d11-8990-db76e0019d81
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
355-358
ISBN (print)
978-3-00-025529-8
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