Sensitive optomechanical ultrasound sensor in a silicon photonic chip towards single-shot photoacoustic imaging with an ultrasound sensor matrix
Cedric Pieters (Katholieke Universiteit Leuven, IMEC-Solliance)
W.J. Westerveld (TU Delft - Mechanical Engineering, IMEC)
Md. Mahmud-Ul-Hasan (IMEC)
Simone Severi (IMEC)
Rami Shnaiderman (Helmholtz Zentrum München, Technische Universität München)
Vasilis Ntziachristos (Technische Universität München, Helmholtz Zentrum München)
Margo Billen (IMEC)
Jon Kjellman (IMEC)
Roelof Jansen (IMEC)
Veronique Rochus (IMEC)
Xavier Rottenberg (IMEC)
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Abstract
We propose a new opto-mechanical ultrasound sensor (OMUS) enabled by an innovative silicon photonics waveguide. We present experimental results up to 30 MHz, a 10-sensor array proof-of-concept and our latest findings.