Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K

Mihailovic, M; Creemer, J.F.; Sarro, PM

Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K

Conference paper (2009)

Authors

M Mihailovic Electronic Components, Technology and Materials

J.F. Creemer Electronic Components, Technology and Materials

PM Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2009

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Research Group

Electronic Components, Technology and Materials

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