Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K
Conference Paper
(2009)
Author(s)
M Mihailovic (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Electronic Components, Technology and Materials)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:03c61fa6-f03a-4f1f-8b21-6beb4f0a241f
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
36-39
ISBN (print)
978-90-73461-62-8
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