Surface-charge-layer sheet-resistance measurements for evaluating interface RF losses on high-resistivity-silicon substrates

Journal Article (2012)
Author(s)

S.B. Evseev (TU Delft - Electronic Components, Technology and Materials)

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

S Milosaviljevic (External organisation)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/TMTT.2012.2215050
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
11
Volume number
60
Pages (from-to)
3542-3550

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