Novel thin film polymer foaming technique for low and ultralow-k dielectrics.
Conference Paper
(2001)
Author(s)
B Krause (External organisation)
GB Koops (External organisation)
NFA van der Vegt (External organisation)
M Wessling (External organisation)
J. van Turnhout (TU Delft - Old - sect Polymer Materials and Engineering (DCT/PME))
M Wubbenhorst (TU Delft - Old - sect Polymer Materials and Engineering (DCT/PME))
Research Group
Old - sect Polymer Materials and Engineering (DCT/PME)
To reference this document use:
https://resolver.tudelft.nl/uuid:048c175e-2a5e-4171-9c00-5b184c0031ba
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Publication Year
2001
Research Group
Old - sect Polymer Materials and Engineering (DCT/PME)
Pages (from-to)
187-190
ISBN (print)
0-7803-4238-0
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