Influence of aperture positon in focussed ion beam systems on statistical Coulomb interaction effects

Conference paper (1996)

Authors

P Kruit P Kruit ImPhys/Charged Particle Optics
XR Jiang XR Jiang ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

1996

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics