Influence of aperture positon in focussed ion beam systems on statistical Coulomb interaction effects
Conference Paper
(1996)
Author(s)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
XR Jiang (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:05ee02c3-a314-4b26-8edd-592745b15a18
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Publication Year
1996
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
166-176
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