Two-dimensional photonic crystals from semiconductor material with polymer filled holes

Conference paper (2006)
Department
Kavli Institute of Nanoscience (AS) (TU Delft)
Copyright: ©2006 Van der Heijden, R., Kjellander, C., Carlström, C.-F., Snijders, J., Van der Heijden, R.W., Bastiaansen, K., Broer, D., Karouta, F., Nötzel, R., Van der Drift, E., et al
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Published Date

20-04-2006

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Source:

Proceedings of SPIE, 2006 vol. 6182

Faculty

Applied Sciences

Department

Kavli Institute of Nanoscience

Abstract

Polymer filling of the air holes of indiumphosphide based two-dimensional photonic crystals is reported. The filling is performed by infiltration with a liquid monomer and solidification of the infill in situ by thermal polymerization. Complete hole filling is obtained with infiltration under ambient pressure. This conclusion is based both on crosssectional scanning electron microscope inspection of the filled samples as well as on optical transmission measurements.

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