Electrostatically Squeezed Elastometers for Out-Of-Plane Microactuation

Conference paper (2006)

Authors

GK Lau Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
T Chu Duc Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2006

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

This paper presents a novel design concept to actuate elastomers using comb-like interconnects and vertically standing electrodes of small width, with the capability of generating out-of-plane displacements. The motion characteristic of the actuators is studied using analytical and finite element methods. It leads to design of short electrodes that restricts the elastomers less. Fabrication of the design is attempted with a good result of elastomer filling of submicron trenches. It promises generating high energy density at moderate driving voltage, compared with air-gap electrostatic actuators.