Performance of miniaturized LPCVD-SiN-membrane-based 7-14 micrometer infrared thermal detector:analytical,modelling and experimental study
Conference Paper
(2008)
Author(s)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
F jutzi (External organisation)
G Pandraud (TU Delft - Electronic Instrumentation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:09eac255-d746-4bca-a04c-a89bdaec8ff5
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
498-501
ISBN (print)
978-1-4244-2581-5
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