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Effect of the interruption of the Propagation Path on the Response of Surface Acoustic Wave Transducers

Conference Paper (2016)
Author(s)

ThuHang Bui (TU Delft - Electrical Engineering, Mathematics and Computer Science)

An Tran (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Bruno Morana (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Jia Wei (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Trinh Chu Duc (Hanoi University of Engineering and Technology)

Pasqualina M. Sarro (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/ICSENS.2016.7808654 Final published version
More Info
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Publication Year
2016
Language
English
Research Group
Electronic Components, Technology and Materials
Article number
7808654
Pages (from-to)
1-3
ISBN (electronic)
978-1-4799-8287-5
Event
IEEE Sensors 2016 (2016-10-30 - 2016-11-02), Caribe Royale All-Suite Hotel and Convention Center, Orlando, FL, United States
Downloads counter
225

Abstract

This paper presents the effect of an arbitrary interruption of the propagation path in Surface Acoustic Wave (SAW) microdevices on the intensity of the scattered surface waves. Using finite element modeling, simulations have been carried out to validate a new equivalent circuit based on the conventional Mason and Smith model. In addition, experimental results obtained with 30, 50 and 100 μm diameter microholes are reported. The comparison of theory, simulation and experiment proves that it is possible to fabricate an interruption like deep microcavities or microholes in the propagation path which results in an acceptable signal magnitude attenuation, but without shift in the operating frequency.