Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition

Journal article (2008)
Faculty
Applied Sciences (AS) (TU Delft)
Copyright: © 2008 Van Dorp, W.F.; Hagen, C.W.; Crozier, P.A.; Kruit, P.
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Published Date

2008

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Source:

Nanotechnology, 19 (22)

Faculty

Applied Sciences

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