Two-dimension fiber optic sensor for high-resolution and long-range linear measurements
A Khiat (TU Delft - Micro and Nano Engineering)
F Lamarque (External organisation)
C Prelle (External organisation)
Ph Pouille (External organisation)
M Leester-Schadel (External organisation)
S Büttgenbach (External organisation)
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Abstract
A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and the experimental measurements are realized by the use of the sensor and high precision actuators. The best and the worst displacement cases are realized with measured limits of resolution of 27.4 nm and 38.7 nm in the range of 8.67 mm and 13.03 mm, respectively.
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