In situ monitoring and control of material growth for high resolution electron beam induced deposition
Journal Article
(2007)
Author(s)
W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)
Kees Hagen (TU Delft - ImPhys/Charged Particle Optics)
P.A. A. Crozier (External organisation)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0ce4a000-1b7d-4606-ab12-5b20af116aea
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Publication Year
2007
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
25
Pages (from-to)
2210-2214
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