Finite Element Modeling of Electro-Mechanical Coupling in Capactive Micro-Systems
Conference Paper
(2005)
Author(s)
V. Rochus (External organisation)
Daniel Rixen (TU Delft - Dynamics of Micro and Nano Systems)
JC Golinval (External organisation)
Research Group
Dynamics of Micro and Nano Systems
To reference this document use:
https://resolver.tudelft.nl/uuid:0d048232-7bd1-4066-98bc-ffbdbc896cdc
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Publication Year
2005
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
704-707
ISBN (print)
0-967985-4-9
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