Effect of surface roughness and substrate geometry on the coating of nanoparticles using atomic layer deposition
Abstract
(2013)
Author(s)
V. Dhanasekaran (TU Delft - ChemE/Product and Process Engineering)
Andrea Fabre (TU Delft - ChemE/Product and Process Engineering)
M.T. Kreutzer (TU Delft - ChemE/Product and Process Engineering)
Jan Rudolf Ruud van Ommen (TU Delft - ChemE/Product and Process Engineering)
Research Group
ChemE/Product and Process Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:0f7edb48-bd83-460d-ade0-346acb59300d
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Publication Year
2013
Language
English
Research Group
ChemE/Product and Process Engineering
Pages (from-to)
1-1
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