Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties
Journal Article
(2015)
Author(s)
E. Serre (TU Delft - Electronic Components, Technology and Materials)
M Bonaldi (External organisation)
Antonio Borrielli (External organisation)
L Conti (External organisation)
G Pandraud (External organisation)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.sna.2015.03.037
To reference this document use:
https://resolver.tudelft.nl/uuid:1261185a-b534-4168-aeab-8e532cfefdc7
More Info
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Publication Year
2015
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
May
Volume number
227
Pages (from-to)
48-54
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