Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties

Serra, E.; Bonaldi, M.; Borrielli, A.; Conti, L; Pandraud, G; Sarro, Lina

Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties

Journal article (2015)

Authors

E. Serra Electronic Components, Technology and Materials

M. Bonaldi External organisation

A. Borrielli External organisation

L Conti External organisation

G Pandraud External organisation

Lina Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2015

Language

English

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Research Group

Electronic Components, Technology and Materials

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