In-plane displacement detection with picometer accuracy on a conventional microscope
Journal Article
(2015)
Author(s)
J. Kokorian (TU Delft - Micro and Nano Engineering)
F Buja (TU Delft - Micro and Nano Engineering)
W.M. van Spengen (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1109/JMEMS.2014.2335153
To reference this document use:
https://resolver.tudelft.nl/uuid:1481b771-1750-4872-8a6b-080b920fd1b1
More Info
expand_more
expand_more
Publication Year
2015
Language
English
Research Group
Micro and Nano Engineering
Issue number
3
Volume number
24
Pages (from-to)
618-625
No files available
Metadata only record. There are no files for this record.