Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation
Journal Article
(2012)
Author(s)
F Santagata (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Electronic Components, Technology and Materials)
Elina Iervolino (TU Delft - Old - EWI Sect. ECTM)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1088/0960-1317/22/10/105025
To reference this document use:
https://resolver.tudelft.nl/uuid:15dd0e40-76ab-4025-b1b8-f74993ab9ae0
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
10
Volume number
22
Pages (from-to)
1-8
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