Influence of Coulomb interactions on choice of magnification, aperture size and source brightness in a two lens focused ion beam column
Journal Article
(1996)
Author(s)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
XR Jiang (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:15e1c7a1-9999-43fe-8411-5563ab6e4ab6
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Publication Year
1996
Research Group
ImPhys/Charged Particle Optics
Issue number
3
Volume number
B14
Pages (from-to)
1635-1641
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