Gas-to-particle conversion in the particle precipitation-aided chemical vapor deposition process. I

Synthesis of the binary compound titanium nitride. The role of aerosols in materials processing

Journal article (1993)
Experimental study Aerosol deposition Particle precipitation Chemical vapor deposition Powder Binary compound Titanium Nitrides (FIN) Gas mixture Titanium Chlorides (ENT) Ammonia (ENT) Nitrogen Molecules (ENT) Hydrogen Molecules (ENT) Instrumentation Hete
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Published Date

1993

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Source:

Aerosol Science and Technology 19(4), 549-561. (1993)

ISSN:

0278-6826

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