Interactive effects in reactive ion etching of W1-xGex
Journal Article
(1997)
Author(s)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
BQ Dinh (External organisation)
PA Verhoeven (External organisation)
EJM Fakkeldij (External organisation)
T Zijlstra (TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:1701a643-e305-4bb6-88cb-286fdbab4327
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Publication Year
1997
Research Group
QN/Kavli Nanolab Delft
Volume number
15
Pages (from-to)
2676-2681
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