Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.
Journal Article
(2000)
Author(s)
J. Driessen (External organisation)
AD Kuypers (External organisation)
J. Schoonman (TU Delft - Old - sect Laboratory Inorganic Chemistry (DCT/AC))
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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https://resolver.tudelft.nl/uuid:1739667e-e991-41a6-b9cd-55020f9d5f0f
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Publication Year
2000
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Issue number
4
Volume number
18
Pages (from-to)
1971-1976
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