Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.

Driessen, J.; Kuypers, AD; Schoonman, J

Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.

Journal article (2000)

Authors

J. Driessen External organisation

AD Kuypers External organisation

J Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)

Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)

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Published Date

2000

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)

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