Development of Silicon Micromachined Microlens Antennas at 1.9 THz

Journal Article (2017)
Author(s)

Maria Alonso-Delpino (California Institute of Technology)

Theodore Reck (California Institute of Technology)

Cecile Jung-Kubiak (California Institute of Technology)

Choonsup Lee (California Institute of Technology)

Goutam Chattopadhyay (California Institute of Technology)

DOI related publication
https://doi.org/10.1109/TTHZ.2017.2655340 Final published version
More Info
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Publication Year
2017
Language
English
Issue number
2
Volume number
7
Article number
7843602
Pages (from-to)
191-198
Downloads counter
180

Abstract

The development at 1.9 THz of a microlens antenna consisting of a leaky-wave waveguide feeding and a silicon microlens is presented in this paper. The antenna has excellent performances compared to horn antennas and can be fabricated entirely using silicon micromachining. Two antenna prototypes were developed: one with a 2.6-mm-diameter microlens and a directivity of 33.2 dB and the other with a 6.35-mm-diameter microlens and a directivity of 41.2 dB. Both prototypes were fabricated and measured, obtaining good agreements with simulations. The fabrication, assembly, and measurement process are explained and detailed in this paper.