Development of Silicon Micromachined Microlens Antennas at 1.9 THz
Maria Alonso-Delpino (California Institute of Technology)
Theodore Reck (California Institute of Technology)
Cecile Jung-Kubiak (California Institute of Technology)
Choonsup Lee (California Institute of Technology)
Goutam Chattopadhyay (California Institute of Technology)
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Abstract
The development at 1.9 THz of a microlens antenna consisting of a leaky-wave waveguide feeding and a silicon microlens is presented in this paper. The antenna has excellent performances compared to horn antennas and can be fabricated entirely using silicon micromachining. Two antenna prototypes were developed: one with a 2.6-mm-diameter microlens and a directivity of 33.2 dB and the other with a 6.35-mm-diameter microlens and a directivity of 41.2 dB. Both prototypes were fabricated and measured, obtaining good agreements with simulations. The fabrication, assembly, and measurement process are explained and detailed in this paper.