Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes

Conference paper (2012)

Authors

N.S. Lawand Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
J Briaire External organisation
JHM Frijns External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation