Growth behaviour near the ultimate resolution of nanometer-scale focused electron beam-induced deposition
Journal Article
(2008)
Author(s)
W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)
Cornelis W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:1b84d3c6-0926-4c4b-a9a3-0fa12f797187
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Publication Year
2008
Research Group
ImPhys/Charged Particle Optics
Issue number
22
Volume number
19
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