Robust-control-relevant coprime factor identification with application to model validation of a wafer stage
Conference Paper
(2009)
Author(s)
Tom Oomen (External organisation)
R Herpen van (External organisation)
Okko Bosgra (TU Delft - DISC)
Research Group
DISC
To reference this document use:
https://resolver.tudelft.nl/uuid:1b8c8014-e6ed-4e94-ad55-8907b7ca7d7d
More Info
expand_more
expand_more
Publication Year
2009
Research Group
DISC
Pages (from-to)
1044-1049
No files available
Metadata only record. There are no files for this record.