Growth and characterization of single crystal Si and dielectric thin films for large area applications: progress report December 2000
Report
(2000)
Author(s)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
H Wallinga (External organisation)
Research Group
Electronic Components, Technology and Materials
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
97TF05@en
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