Cavity formation in a silicon cap wafer using aluminum etch-stop layer
Conference Paper
(2007)
Author(s)
S Sosin (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
J Tian (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
M Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Old - EWI Ch. Integrated Sensing Devices
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https://resolver.tudelft.nl/uuid:1c958e2b-7394-4e47-8be2-a669a9884093
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Publication Year
2007
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
304-308
ISBN (print)
978-952-99751-1-2
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