Cavity formation in a silicon cap wafer using aluminum etch-stop layer

Conference paper (2007)

Authors

S Sosin Old - EWI Ch. Integrated Sensing Devices
J. Tian Old - EWI Ch. Integrated Sensing Devices
M. Bartek Old - EWI Ch. Integrated Sensing Devices
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2007

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices