Subnanometer stability of nano-stage supports
Journal Article
(1997)
Author(s)
H van der Wulp (External organisation)
PV Pistecky (External organisation)
WC Heerens (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:1db4cf91-9762-4738-9fb7-5a4a8661803e
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Publication Year
1997
Research Group
ImPhys/Charged Particle Optics
Issue number
3
Volume number
15
Pages (from-to)
566-573
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