Selective Solid-Phase Epitaxy of Ultra-Shallow p+ Aluminum-Doped Silicon Junctions for Integration in Nanodevices
Conference Paper
(2006)
Author(s)
Y Civale (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
P Hadley (TU Delft - QN/Mol. Electronics & Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:1de01bd9-e061-49e1-8150-4389363d061b
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
55-56
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