Self-tuning in sliding mode control of high-precision motion systems

Conference Paper (2013)
Author(s)

Marcel Heertjes (ASML)

Y. Vardar (Eindhoven University of Technology)

Affiliation
External organisation
DOI related publication
https://doi.org/10.3182/20130410-3-CN-2034.00019
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Publication Year
2013
Language
English
Affiliation
External organisation
Pages (from-to)
13-19
ISBN (print)
9783902823311

Abstract

In high-precision motion systems, set-point tracking often comes with the problem of overshoot, hence poor settling behavior. To avoid overshoot, PD control (thus without using an integrator) is preferred over PID control. However, PD control gives rise to steady-state error in view of the constant disturbances acting on the system. To deal with both overshoot and steady-state error, a sliding mode controller with saturated integrator is studied. For large servo signals the controller is switched to PD mode as to constrain the integrator buffer and therefore the overshoot. For small servo signals the controller switches to PID mode as to avoid steady-state error. The tuning of the switching parameters will be done automatically with the aim to optimize the settling behavior. The sliding mode controller will be tested on a high-precision motion system.

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