Mechanical characterization of SiLK by Nanoindentation and substrate curvature techniques

Conference Paper (2004)
Author(s)

V Gonda (TU Delft - Dynamics of Micro and Nano Systems)

KMB Jansen (TU Delft - Dynamics of Micro and Nano Systems)

L.J. Ernst (TU Delft - Dynamics of Micro and Nano Systems)

J Den Toonder (External organisation)

GQ Zhang (External organisation)

Research Group
Dynamics of Micro and Nano Systems
More Info
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Publication Year
2004
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
373-376
ISBN (print)
0-7803-8420-2

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