Mechanical characterization of SiLK by Nanoindentation and substrate curvature techniques
Conference Paper
(2004)
Author(s)
V Gonda (TU Delft - Dynamics of Micro and Nano Systems)
KMB Jansen (TU Delft - Dynamics of Micro and Nano Systems)
L.J. Ernst (TU Delft - Dynamics of Micro and Nano Systems)
J Den Toonder (External organisation)
GQ Zhang (External organisation)
Research Group
Dynamics of Micro and Nano Systems
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Publication Year
2004
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
373-376
ISBN (print)
0-7803-8420-2
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