Piezoresistive cantilever beam for force sensing in two dimension
Journal Article
(2007)
Author(s)
T Chu Duc (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Old - EWI Sect. ECTM)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:2034451f-f362-433e-b2d1-0248b774159f
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Volume number
7
Pages (from-to)
96-104
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