Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane-part 2.Thermal property and sensitivity
Journal Article
(2009)
Author(s)
F jutzi (External organisation)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
Gregory Pandraud (TU Delft - Electronic Instrumentation)
N de rooij (External organisation)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:20aa9fbc-8ec7-4253-bed6-7a435f03f76b
More Info
expand_more
expand_more
Publication Year
2009
Research Group
Electronic Instrumentation
Volume number
A152-2(2)
Pages (from-to)
126-138
No files available
Metadata only record. There are no files for this record.