Numerical simulations of rarefied gas flows in thin film processes
Doctoral Thesis
(2007)
Author(s)
R Dorsman (TU Delft - MSP/Thermal & Materials Processes)
Research Group
MSP/Thermal & Materials Processes
To reference this document use:
https://resolver.tudelft.nl/uuid:21a243de-ad7a-45be-87d2-7b5c3cde2159
More Info
expand_more
expand_more
Publication Year
2007
Research Group
MSP/Thermal & Materials Processes
No files available
Metadata only record. There are no files for this record.