Experimentally validated multivariable feedback controller design for a high-precision wafer stage
Conference Paper
(2001)
Author(s)
M van der Wal (External organisation)
G van Baars (External organisation)
F Sperling (External organisation)
Okko Bosgra (TU Delft - DISC)
Research Group
DISC
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https://resolver.tudelft.nl/uuid:221a6f7f-db88-4ddf-beb4-4e4e681aff0e
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Publication Year
2001
Research Group
DISC
Pages (from-to)
1583-1588
ISBN (print)
0-7803-7061-9
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