Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor

Abstract (2010)
Author(s)

A. Purniawan (TU Delft - Electronic Instrumentation)

G. Pandraud (TU Delft - Electronic Components, Technology and Materials)

P. J. French (TU Delft - Electronic Instrumentation)

E Margallo Balbas (TU Delft - Electronic Instrumentation)

Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
62-62

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