Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor
Abstract
(2010)
Author(s)
A. Purniawan (TU Delft - Electronic Instrumentation)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
P. J. French (TU Delft - Electronic Instrumentation)
E Margallo Balbas (TU Delft - Electronic Instrumentation)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:2259efa1-c24d-4773-bec8-c56123223fa8
More Info
expand_more
expand_more
Publication Year
2010
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
62-62
No files available
Metadata only record. There are no files for this record.