Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor

Abstract (2010)

Authors

A. Purniawan Electronic Instrumentation - EEMCS
G. Pandraud Electronic Components, Technology and Materials - EEMCS
P.J. French Electronic Instrumentation - EEMCS
E Margallo Balbas Electronic Instrumentation - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation