Galvanic etch stop for Si in KOH

Connolly, E; French, Patrick J.; Kelly, JJ

Galvanic etch stop for Si in KOH

Journal article (2004)

Authors

E Connolly Electronic Instrumentation

Patrick J. French Electronic Instrumentation

JJ Kelly External organisation

Research Group

Electronic Instrumentation

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Published Date

2004

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Research Group

Electronic Instrumentation

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