Galvanic etch stop for Si in KOH

Journal article (2004)

Authors

E Connolly Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
JJ Kelly External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation