Towards fast AFM-based nanometrology and nanomanufacturing

Journal article (2012)

Authors

G Schitter Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
J. Steininger External organisation
FCA Heuck Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design