Towards fast AFM-based nanometrology and nanomanufacturing
Journal Article
(2012)
Author(s)
G Schitter (TU Delft - Mechatronic Systems Design)
J. Steininger (External organisation)
FCA Heuck (TU Delft - Micro and Nano Engineering)
U. Staufer (TU Delft - Micro and Nano Engineering)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:24175aa0-4720-4997-9eb3-a5b6c54cb8f1
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Publication Year
2012
Language
English
Research Group
Mechatronic Systems Design
Issue number
5/6
Volume number
8
Pages (from-to)
392-418
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