A critical literature review of focused electron beam induced deposition
Journal Article
(2008)
Author(s)
WF van Dorp (TU Delft - ImPhys/Charged Particle Optics)
C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:24c36f21-5374-4175-97b7-c6b00bcbc8fd
More Info
expand_more
expand_more
Publication Year
2008
Research Group
ImPhys/Charged Particle Optics
Volume number
104
No files available
Metadata only record. There are no files for this record.