IC compatible wafer level fabrication of silicon nanowire field effect transistors for biosensing applications

Doctoral thesis (2013)

Authors

T.S.Y. Moh Electronic Components, Technology and Materials - EEMCS , OLD ChemE/Organic Materials and Interfaces
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials